A diagram showing the MAXPEEM end station

The MAXPEEM endstation is shown in the scheme above, it comprises two main chambers: the preparation chamber, dedicated to sample preparation and treatment facilities, and the main chamber, dedicated to the analysis of the sample surface.

The samples are introduced in a small fast entry chamber connected to the preparation chamber and are then transferred to the preparation or to the main chamber using a transfer arm (top right of the scheme). The main chamber hosts the aberration-corrected SPELEEM microscope (Elmitec GmbH) that consists of nine parts: the illumination optics, two beam separators, the magnetic objective, the intermediate optics, the aberration corrector, the imaging optics, the energy analyzer and the projective system.

The main characteristics of the endstation are summarised in the tables below.

Preparation chamber

Base pressure2⋅10⁻¹⁰ mbar
Sample manipulation4-axis manipulator with 3 translations (x,y,z) and 1 polar rotation
only z is motorized
Heatingradiative heating (up to 400 °C)
e-beam heating (up to 1500 °C)

the temperature is measured with a C-type thermocouple (W5%Re/W26%Re) spot-welded on the Mo ring under the sample, an infrared pyrometer is also available
CharacterizationRGA (MKS, Microvision 2)
LEED (Specs, ErLEED 3000D)
Sputter gunavailable (Varian, 981-2043)
Metal evaporatoravailable (Focus GmbH, EFM 3)
Dosingtwo leak valves are mounted on CF40 flanges, one of the leak valves is connected to the gas line composed by two inlets and a dedicated pumping system

please, contact the beamline staff in advance if gas usage is planned
Available portsthere are additional ports available for user supplied sources:

-four CF40
-two CF63
-one CF100
Otherit is possible to load one sample per time in the fast entry chamber that is directly connected to the preparation chamber

possibility to attach vacuum suitcase

Main chamber

Base pressure4⋅10⁻¹¹ mbar
Sample manipulation3-axis manipulator with 3 translations (x,y,z) plus 1 tilt adjustment (±2°)

travel range for x and y: ±5mm
Heatingradiative heating (up to 400 °C)
e-beam heating (up to 1500 °C)

the temperature is measured with a C-type thermocouple (W5%Re/W26%Re) spot-welded on the Mo ring under the sample, an infrared pyrometer is also available
CoolingLN2
UV lightsourceLOT-QuantumDesign GmbH
Hg arc lamp
Sample storagecapacity: 5 samples
Available portsthere are additional ports (CF40) available for user supplied sources