Two UHV preparation chambers are available on the A-branch endstation

“PrepMain”

Base pressure1⋅10-10mbar
Sample manipulation4-axis Prevac LHe open cycle manipulator
Sputter gunYes
HeatingElectron beam
Direct current
CoolingLN2: 80K
LHe: 40-50K
CharacterizationScientaOmicron 3-grid SPECTRALEED
Thickness monitor
RGA
Wobble stick for cleaving
Deposition2 quick install deposition source ports CF 40
Additional CF40 ports
Gas dosingLeak valve
OtherPossibility to attach vacuum suitcase

“PrepSec”

Base pressure1⋅10-10mbar
Sample manipulation4-axis Prevac LN2 manipulator
Sputter gunYes
HeatingElectron beam
Direct current
Resistive
CoolingLN2: 100K
CharacterizationScientaOmicron 3-grid SPECTRALEED
Thickness monitor
RGA
Wobble stick for cleaving
Deposition2 quick install deposition source ports CF 40
Additional CF40 ports for user supplied evaporation sources
Gas dosingLeak valve